| 摘要 |
<p>PURPOSE:To prevent particles from ahering to a semiconductor wafer by making smooth a gas flow in a furnace tube. CONSTITUTION:A boat 2 includes a front part 10 and a rear part 12, both streamlined in a furnace tube 20. It further includes a central portion slits for receiving semiconductor wafers 1 in such a manner that they are perpendicular to the flow of gas. It furthermore includes a lower portion for which a leg 14 is provided such that the boat is insertable into the oven core pipe 20. Thus, the front part and the rear part make smooth the gas flow in the tube to prevent particles from adhering thereto owing to wind-up. Additionally, a plurality of semiconductor wafers can be treated simultaneously, and they can be easily taken out, so that maintenance such as cleaning is facilitated.</p> |
