| 摘要 |
<p>PROBLEM TO BE SOLVED: To enhance mechanical strength at the bridge part and joint of a sensor by forming a resistor of platinum pattern on a permalloy or nickel layer and an insulation layer. SOLUTION: A permalloy or nickel layer 12, an insulation layer 13 of nitride or the like, a platinum pattern (resistor) 14 and an overcoat glass layer 15 are formed sequentially on an iron or stainless steel substrate 11 which is then removed from the underside of pattern 14 to form a cavity 17. Since the substrate 11, the permalloy or nickel layer 12 and the insulation layer 13 are excellent in mechanical strength, heat resistance and heat shock resistance, strength is enhanced at the thinnest bridge part (cavity 17) of sensor and the joint thereof to the substrate 11. When the layer 12 is set at about 10μm thick, the bridge part can be protected against fracture even if the air (e.g. backfire of engine) flows at current velocity of 200m/s or above in the direction of sin3 deg. with respect to the flow direction of a fluid to be measured.</p> |
