| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a glas waveguide element capable of stably forming a glass film which has no impurity incorporation and has reproducibility and excellent characteristics. SOLUTION: Incorporation of carbon gasified from a turn table 20 into the glass film is prevented by using a material stable at high temp. as a turn table 20 on which a substrate 3 is arranged, thereby obtaining the glass waveguide element having reproducibility and excellent characteristics. When a surface of the turn table 2 is coated with the material stable at high temp. or when a part to be at high temp. of the surface of the turn table 2 is coated with the material stable at high temp. and when the part to be at high temp. of the surface of the turn table 2 is covered with a mask 24 coated with the material stable at high temp., the incorporation of materials gasified from the turn table 2 (20) as impurities into the glass film is prevented in any case. |
