Separation arrangement e.g. for micro components such as separating microchips from adhesive carrier
摘要
The arrangement has a housing body (2) whose end surface forms the contact surface for the carrier, a separation region (19), an adjacent device for fixing the adhesive carrier (30) during separation of a micro component (20') and at least one restraining device. The separation region has a recess (4') and a supporting element (10,10') with a separation edge (16). At least one suction channel (7) opens into the recess next to the separating edge.
申请公布号
DE19752582(A1)
申请公布日期
1999.06.10
申请号
DE19971052582
申请日期
1997.11.27
申请人
INSTITUT FUER MIKROTECHNIK MAINZ GMBH, 55129 MAINZ, DE