| 摘要 |
PROBLEM TO BE SOLVED: To widen the selection width of material elements and to make high speed scanning of an X-ray source position by high speed deflection of laser beams possible by irradiating a ablation laser to a recess formed in a solid target to vaporize the inner wall part, and irradiating heated laser to a higher densified part. SOLUTION: A semispherical recess 12 is formed in a solid target 11. A ablation laser is irradiated to the recess 12 to vaporize only the extreme surface part in the inner wall of the recess 12. The vaporized material 14 in the surface layer starts expansion to the vacuum side. The required minimum amount of the material is stripped off from the solid, then the temperature of the solid target 11 is lowered to the vaporizing temperature or lower. In other words, when the vaporized material is heated until a high temperature plasma is generated, radiation is emitted from the vaporized material. The vaporized material stripped off from the solid target 11 is moved to the central part of the space in the space in the recess 12, and a high densified part 15 is formed in the central part. A heating pulse laser 17 is irradiated to the high densified part 15 formed. |
