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发明名称
PVD process for the deposition of multi-component hard material layers
摘要
申请公布号
EP0668369(B1)
申请公布日期
1999.11.03
申请号
EP19950102352
申请日期
1995.02.20
申请人
HAUZER HOLDING B.V.
发明人
MUENZ, WOLF-DIETER, DR.;TRINH, THUAN-THON, DIPL.-ING.;HURKMANS, ANTONIUS PETRUS ARNOLDUS, IR.
分类号
C23C14/32;C23C14/35;(IPC1-7):C23C14/32
主分类号
C23C14/32
代理机构
代理人
主权项
地址
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