Method of measuring refractive index of thin film,申请号EP19930113919-传众专利搜索

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发明名称	Method of measuring refractive index of thin film
摘要
申请公布号	EP0585883(B1)	申请公布日期	1999.11.03
申请号	EP19930113919	申请日期	1993.08.31
申请人	SHINCRON CO., LTD.	发明人	SAISHO, SHINICHIRO;IKEDA, TOSHINOBU;ODAGIRI, AKIRA
分类号	C23C14/54;G01N21/41;G01N21/84;(IPC1-7):G01N21/41	主分类号	C23C14/54
代理机构		代理人
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