| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas flow rate controller with which the first drive of a flow rate control part is stabilized. SOLUTION: This device is provided with the flow rate control part having a gas flow rate adjusting function and a gas stop function, a stepping motor 34 for driving the flow rate control part, a position judging rate means 90 for detecting the flow control position of the flow rate control part and the shielding state of gas and a drive control part 58 for judging the position based on the output from the position judging means by driving the stepping motor 34 and in the case of abnormal operation in which the prescribed position of the position discriminating means 90 is not reached even when the prescribed number of pulses is fed to the stepping motor 34, the drive control part supplies power by increasing the supply power for increasing the torque of the stepping motor 34 so that a sure drive can be expected even in the first drive. |
