NET-TYPE BONDING PAD MASK

摘要

PURPOSE: A net-type bonding pad mask is provided to overcome a difference of exposure energy and a difference of focal offset, by disposing a plurality of bars between mask layer patterns and by subdividing a light transmitting portion into sub light transmitting portions. CONSTITUTION: A positive mask(110) has patterns defining vias of a cell array and wire bonding pads. The light transmitting portion(115) defines the size of the wire bonding pad. Mask layer patterns define a plurality of island-type insulators, disposed as a net type inside the light transmitting portion. The plurality of bars(117) having a size not greater than a resolution limit subdivide the light transmitting portion into the plurality of sub light transmitting portions(119), disposed among the mask layer patterns.