| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a pellicle excellent in mechanical strength, preventing the tarnish and roughening of the surface of a pellicle frame over a long period of time in spite of the black inside of the pellicle frame even when a short- wavelength light source for exposure is used and excellent also in light resistance. SOLUTION: In the pellicle comprising a pellicle membrane and a pellicle frame with the pellicle membrane stretched on one end face, the pellicle frame is obtained by combining an outside member comprising an aluminum alloy excellent in mechanical strength with an inside member comprising an aluminum alloy subjected to black alumite treatment by natural color appearance or black ceramics.</p> |
