COLD CATHODE FIELD ELECTRON EMISSION ELEMENT, ITS MANUFACTURING METHOD, AND COLD CATHODE FIELD ELECTRON EMISSION DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a cold cathode field electron emission element capable of uniformly and easily forming an electron emission part having high electron emission efficiency. SOLUTION: This cold cathode field electron emission element has: a cathode electrode 11 formed on a support body 10; an insulating layer 12 formed on the support body 10 and the cathode electrode 11; a gate electrode 13 formed on the insulating layer 12; an opening part 14 formed in the gate electrode 13 and the insulating layer 12; and a plurality of electron emission parts 15A and 15B formed on the cathode electrode 11 located on the bottom of the opening part 14. In this case, the electron emission parts 15A and 15B are arranged on concentric opening part analogizing figures around the center part of the opening part 14, and the height of electron emission end parts 15a and 15b of the respective parts 15A and 15B increases as the electron emission parts are positioned close to the center part of the opening part 14.