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发明名称
SINGLE SEMICONDUCTOR WAFER PROCESSOR
摘要
申请公布号
EP1242198(A1)
申请公布日期
2002.09.25
申请号
EP20000968470
申请日期
2000.09.28
申请人
SEMITOOL, INC.
发明人
SCRANTON, DANA;CURTIS, GARY, L.
分类号
H01L21/304;H01L21/00;(IPC1-7):B08B3/00
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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