METHOD OF MANUFACTURING ORGANIC SEMICONDUCTOR ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide the method of an organic semiconductor element which prevents the TFT characteristics from deteriorating, even if the channel length or width of the element is short, whereas an element having a short channel length or width is indispensable for miniaturizing a device using an organic TFT in its manufacture. SOLUTION: The manufacturing method bakes an element after vacuum evaporation of an organic semiconductor film. Concretely, it forms the organic semiconductor film and heats this film at the atmospheric pressure or a low pressure. The baking process may be conducted in an inert gas atmosphere. COPYRIGHT: (C)2005,JPO&NCIPI