| 发明名称 |
LINEAR MOTOR, STAGE SET AND ALIGNER |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress impact on a magnetic circuit while suppressing heat generation. <P>SOLUTION: A coil body 62 and a magnetism generating body 72 supported on a yoke 71 are moved relatively. The yoke 71 is constituted by stacking a first split body 71A, and a second split body 71B having a width in the relative moving direction different from that of the first split body 71A through an electric insulating portion 74. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
| 申请公布号 |
JP2006230127(A) |
申请公布日期 |
2006.08.31 |
| 申请号 |
JP20050042073 |
申请日期 |
2005.02.18 |
| 申请人 |
NIKON CORP |
发明人 |
KOMINAMI TADAHIRO;KATO HIROSHI |
| 分类号 |
H02K41/03;H01L21/027;H02K9/04;H02K41/02 |
主分类号 |
H02K41/03 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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