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发明名称
摘要
申请公布号	JP3860075(B2)	申请公布日期	2006.12.20
申请号	JP20020157567	申请日期	2002.05.30
申请人		发明人
分类号	G01R31/28;G01R31/3185;G01R31/319;G06F9/38;H01L21/66;H01L21/822;H01L27/04;H03K19/00	主分类号	G01R31/28
代理机构		代理人
主权项
地址

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