| 摘要 |
<P>PROBLEM TO BE SOLVED: To extract a reference pattern from a part without any adhesion of dust, or the like. <P>SOLUTION: In a reference pattern extraction method, a reference pattern having a unique signal feature is extracted in a region to be measured having an area that is smaller than that of a prescribed region optionally set into the prescribed region on an object having a plurality of prescribed regions where essentially identical machining is made. The reference pattern extraction method comprises: a process S12 for measuring signal information at the region to be measured in a first prescribed region selected optionally from the plurality of prescribed regions; a process S17 for extracting a candidate pattern having a unique signal feature in the region to be measured, based on the signal information measured in the process; a process S22 for measuring the region to be measured in a second prescribed region differing from the first prescribed region in the plurality of prescribed regions; a process S23 for extracting a comparison pattern corresponding to the candidate pattern, based on the signal information measured in the process; and a process S25 for determining the aptitude of the candidate pattern as the reference pattern, based on the comparison pattern. <P>COPYRIGHT: (C)2008,JPO&INPIT |
