发明名称 Methods of making magnetic write heads with use of linewidth shrinkage techniques
摘要 In one illustrative example, a method for use in making a magnetic write head includes the steps of forming a first pole piece layer of a first pole piece; forming a patterned resist over the first pole piece layer; electroplating a pedestal over the first pole piece layer within a channel of the patterned resist; electroplating a metal gap layer over the pedestal within the channel of the patterned resist; forming a resist channel shrinking film over the patterned resist; baking the resist channel shrinking film over the patterned to thereby reduce a width of the channel; removing the resist channel shrinking film; electroplating a second pole piece within the reduced-width channel of the patterned resist; removing the patterned resist; and milling the pedestal, using the second pole piece as a mask, to form a central notched pedestal having side walls with angled slopes.
申请公布号 US7343666(B2) 申请公布日期 2008.03.18
申请号 US20040881782 申请日期 2004.06.30
申请人 HITACHI GLOBAL STORAGE TECHNOLOGIES NETHERLANDS B.V. 发明人 LEE KIM Y.;LO JYH-SHUEY JERRY;MCKEAN DENNIS RICHARD
分类号 G11B5/127;H04R31/00 主分类号 G11B5/127
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