发明名称 Moving mechanism and stage system in exposure apparatus
摘要 A moving mechanism includes a first structural member having a first guide surface, a moving member being movable along the first guide surface, a second structural member having a second guide surface, and an actuator having a movable element provided on the moving member and a stator which is movable along the second guide surface. The first structural member is supported by the second structural member at three positions.
申请公布号 US7346414(B2) 申请公布日期 2008.03.18
申请号 US20050210786 申请日期 2005.08.25
申请人 CANON KABUSHIKI KAISHA 发明人 TANAKA HIDEO;IWAMOTO KAZUNORI;TAKABAYASHI YUKIO
分类号 G12B5/00;G03F7/20;G05D3/00;H01L21/027;H01L21/68 主分类号 G12B5/00
代理机构 代理人
主权项
地址