| 发明名称 |
USE OF VACUUM CHUCKS TO HOLD A WAFER OR WAFER SUB-STACK |
| 摘要 |
Techniques are described for holding a wafer or wafer sub-stack to facilitate further processing of the wafer of sub-stack. In some implementations, a wafer or wafer sub-stack is held by a vacuum chuck in a manner that can help reduce bending of the wafer or wafer sub-stack. |
| 申请公布号 |
SG10201610943T(A) |
申请公布日期 |
2017.02.27 |
| 申请号 |
SGT10201610943 |
申请日期 |
2013.06.28 |
| 申请人 |
HEPTAGON MICRO OPTICS PTE. LTD. |
发明人 |
RUDMANN, HARTMUT;HEIMGARTNER, STEPHAN;VIDALLON, JOHN A. |
| 分类号 |
|
主分类号 |
|
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
