| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring method improved in measurement accuracy by removing an influence of multiple reflection. SOLUTION: This shape measuring method using a shape measuring device for measuring a three-dimensional shape of a specimen by a phase shift method has a first step (S101-S105) of removing the influence of multiple reflection of a projection pattern in an image of the specimen based on a plurality of image information of the specimen acquired by projecting respectively each projection pattern of stripe patterns having each mutually different phase; and a second step (S106-S107) of measuring the three-dimensional shape of the specimen based on the image of the specimen from which the influence of multiple reflection is removed in the first step. COPYRIGHT: (C)2009,JPO&INPIT
|
