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发明名称
摘要
申请公布号
JP4234397(B2)
申请公布日期
2009.03.04
申请号
JP20020329187
申请日期
2002.11.13
申请人
发明人
分类号
H01L23/12;G01R31/26;G11C29/50;H01L21/66;H01L27/108;H01L29/00
主分类号
H01L23/12
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