EVALUATION METHOD FOR ANTI-PLASMA

摘要

An anti-plasma evaluation method is provided to maintain a constant plasma density in a chamber by controlling the power of the plasma generator based on the plasma density. A process of manufacturing a specimen is performed(P1). A withstand voltage of the manufactured specimen is measured by performing an initial withstand voltage measurement process(P2). An operation condition of the plasma generating chamber is set to an experiment environment(P3). The specimen is positioned on the set chamber. The anti-plasma experiment process is performed by exposing the specimen to the plasma(P4). The withstand voltage of the specimen is measured(P5). The measured second withstand voltage value is compared with the initial withstand measurement value(P6).