SHIELD MASK MOUNTING FITTING FOR A SPUTTERING APPARATUS

摘要

A shield mask mounting fitting includes a shied mask to be mounted on a chamber wall of a sputtering apparatus, the shield mask including a fixing hole, a fixing bolt connecting the shield mask to the chamber wall through the fixing hole, a cap hook surrounding a top of the fixing bolt, a bushing extending between a surface of the shield mask and the cap hook, and a shield cap engaged with the cap hook and covering the top of the fixing bolt, the shield cap extending beyond the cap hook to omnidirectionally cover a periphery of the fixing hole, wherein one of the cap hook and the shield cap has an asymmetric structure with respect to an axis extending through a center of the fixing bolt.

主权项

1. A shield mask mounting fitting, comprising:
a shied mask to be mounted on a chamber wall of a sputtering apparatus, the shield mask including a fixing hole; a fixing bolt connecting the shield mask to the chamber wall through the fixing hole; a cap hook surrounding a top of the fixing bolt; a bushing extending between a surface of the shield mask and the cap hook; and a shield cap engaged with the cap hook and covering the top of the fixing bolt, the shield cap extending beyond the cap hook to omnidirectionally cover a periphery of the fixing hole, wherein one of the cap hook and the shield cap has an asymmetric structure with respect to an axis extending through a center of the fixing bolt.