POSITION CONTROLLABLE MAGNET PLATE

摘要

The present invention provides a position controllable magnet plate capable of performing a deposition process without replacing a magnet plate even when a mask is changed. The position controllable magnet plate according to the present disclosure is arrayed in rows with at least two relocatable magnet units, in which each of the relocatable magnet units includes: a magnet supporter formed at an upper portion thereof with a magnet coupling part and at a lower portion thereof with a plurality of cam followers and at least two first transfer plate coupling protrusions disposed at a predetermined interval, and extending in the horizontal direction; a magnet guide plate disposed beneath the magnet supporter, including a guide cam hole into which the cam follower is inserted and which has a predetermined width in the oblique direction such that the cam follower is movable within the guide cam hole, including a connection hole with which the first transfer plate coupling protrusion is communicated and which has a predetermined width such that the first transfer plate coupling protrusion is movable within the connection hole, and extending in the horizontal direction; a first transfer plate coupled to the first transfer plate coupling protrusion penetrating the connection hole; a first linear motion (LM) guide coupled to a lower part of the first transfer plate, and formed such that the first transfer plate is movable in the direction of thickness of the magnet guide plate; a second transfer plate coupled to a lower part of the magnet guide plate; a second LM guide coupled to a lower part of the second transfer plate, and formed such that the second transfer plate is movable in the longitudinal direction of the magnet guide plate; and a transfer tool mounted at an end of the magnet guide plate for linearly transferring the magnet guide plate. The first and the second LM guides of the relocatable magnet unit arrayed in rows are fixedly supported.