发明名称 |
ADHESION LAYER FORMATION COMPOSITION, MANUFACTURING METHOD HARDENED PATTERN, MANUFACTURING METHOD OF OPTICAL COMPONENT, MANUFACTURING METHOD OF CIRCUIT BOARD, MANUFACTURING METHOD OF IMPRINT MOLD AND DEVICE COMPONENT |
摘要 |
PROBLEM TO BE SOLVED: To provide an adhesion layer formation composition capable of preventing occurrence of pattern peel-off defect.SOLUTION: The adhesion layer formation composition contains: a compound (A) which has at least five of either one or both of alkoxyalkyl group alkyl groups or alkylol group in one molecule in total; and a compound (B) which has at least two thiol groups in one molecule.SELECTED DRAWING: Figure 1 |
申请公布号 |
JP2016146468(A) |
申请公布日期 |
2016.08.12 |
申请号 |
JP20150221384 |
申请日期 |
2015.11.11 |
申请人 |
CANON INC |
发明人 |
HONMA TAKESHI;ITO TOSHIKI;OTANI TOMONORI |
分类号 |
H01L21/027;B29C33/38;B29C59/02;B81C99/00;C08G75/04 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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