发明名称 ADHESION LAYER FORMATION COMPOSITION, MANUFACTURING METHOD HARDENED PATTERN, MANUFACTURING METHOD OF OPTICAL COMPONENT, MANUFACTURING METHOD OF CIRCUIT BOARD, MANUFACTURING METHOD OF IMPRINT MOLD AND DEVICE COMPONENT
摘要 PROBLEM TO BE SOLVED: To provide an adhesion layer formation composition capable of preventing occurrence of pattern peel-off defect.SOLUTION: The adhesion layer formation composition contains: a compound (A) which has at least five of either one or both of alkoxyalkyl group alkyl groups or alkylol group in one molecule in total; and a compound (B) which has at least two thiol groups in one molecule.SELECTED DRAWING: Figure 1
申请公布号 JP2016146468(A) 申请公布日期 2016.08.12
申请号 JP20150221384 申请日期 2015.11.11
申请人 CANON INC 发明人 HONMA TAKESHI;ITO TOSHIKI;OTANI TOMONORI
分类号 H01L21/027;B29C33/38;B29C59/02;B81C99/00;C08G75/04 主分类号 H01L21/027
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