A MANUFACTURING METHOD OF HIGH TOUGHNESS-YTTRIA WITH ADDITION OF ALUMINA AND ZIRCONIA

摘要

The present invention relates to a method for manufacturing a high-toughness yttria (Y_2O_3) sintered body added with an alumina (Al_2O_3) and a zirconia (ZrO_2). More specifically, the present invention relates a method for manufacturing a ceramic product for a semiconductor CVD process with improved fracture toughness and mechanical properties by reducing the sintering temperature by adding other additives, except an alumina and a zirconia, to yttria powder, and dividing a sintering process into two steps to suppress grain growth by low-temperature sintering when manufacturing a yttria sintered body.