| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve reliability by facilitating adjustment of atmosphere in a cavity. <P>SOLUTION: A substrate 12 of an electric component has a function element 11. A first insulating film 14 forms the cavity 13 to store the function element 11 with the substrate 12 and has a plurality of through-holes 14a. A second insulating film 15 is formed on the first film 14 by closing upper surfaces of a plurality of the through-holes 14a, and its gas permeability is larger than that of the first film 14. A third insulating film 16 is formed on the second film 15 and its gas permeability is smaller than that of the second film 15. A fourth insulating film 17 is formed on the third film 16 and its elasticity is larger than that of the third film 16. <P>COPYRIGHT: (C)2009,JPO&INPIT |
