| 摘要 |
1,197,756. Coating with metals &c. TEXAS INSTRUMENTS, Inc. July 28, 1967 [Nov.8, 1966], No.34823/67. Heading C7F. [Also in Division C1] A thin film of a metal carbide or nitride is deposited on a substrate from a gaseous metal containing compound in the presence of a glow discharge struck between 2 electrodes. A carbide may be produced using an organic metal containing compound, or a mixture e.g. of TiCl 4 and CH 4 or CCl 4 . A nitride may be produced using TiCl 4 or AlCl 3 with N 2 or NH 3 . The substrate, e.g. Si, may be attached to one of the electrodes or spaced therefrom, and may be heated. D.C. or A.C. power supply may be used. The apparatus used may be a bell-jar with the electrodes protruding through the base, or a closed tube with the electrodes mounted in the ends. |
