发明名称 COMPOSITION FOR FORMING FERROELECTRIC THIN FILM AND FERROELECTRIC THIN FILM AS WELL AS LIQUID INJECTION HEAD
摘要 <P>PROBLEM TO BE SOLVED: To provide a composition for forming a ferroelectric thin film capable of forming a high-density film and having excellent storage stability, and a ferroelectric thin film as well as a liquid injection head. <P>SOLUTION: The composition for forming the ferroelectric thin film comprises at least a colloidal solution, containing a metal constituting the ferroelectric thin film, having an average colloidal particle diameter of 1-100 nm, and providing a particle size distribution having two or more peaks. And the ferroelectric thin film is made of the composition for forming the ferroelectric thin film, and the liquid injection head is provided with a piezoelectric element having the ferroelectric thin film. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006111516(A) 申请公布日期 2006.04.27
申请号 JP20050004357 申请日期 2005.01.11
申请人 SEIKO EPSON CORP 发明人 KAMEI HIROYUKI
分类号 C04B35/00;B41J2/045;B41J2/055;B41J2/135;B41J2/14;B41J2/145;B41J2/16;B82Y10/00;B82Y30/00;B82Y40/00;C01G25/00;C01G33/00;C01G35/00;C01G53/00;C04B35/49;C04B35/491;H01L21/316;H01L41/09;H01L41/187 主分类号 C04B35/00
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