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发明名称
VERFAHREN ZUM HERSTELLEN EINER VIELZAHL VON HALBLEITERANORDNUNGEN, INSBESONDERE LEISTUNGSTRANSISTOREN
摘要
申请公布号
DE2014173(B2)
申请公布日期
1972.04.06
申请号
DE19702014173
申请日期
1970.03.24
申请人
发明人
分类号
H01L21/301;H01L21/306;H01L21/308;H01L21/331;H01L29/00;H01L29/73;H01L29/74;H01L29/861;(IPC1-7):H01L7/64
主分类号
H01L21/301
代理机构
代理人
主权项
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