| 发明名称 |
PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR, INK JET RECORDING HEAD, INK JET PRINTER, SURFACE ACOUSTIC WAVE ELEMENT, FREQUENCY FILTER, OSCILLATOR, ELECTRONIC CIRCUIT, THIN FILM PIEZOELECTRIC RESONATOR, AND ELECTRONIC APPARATUS |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element having a piezoelectric film exhibiting good piezoelectric characteristics. <P>SOLUTION: The piezoelectric element comprises a substrate, a buffer layer 5 formed above the substrate, a piezoelectric film 6 formed above the buffer layer 5, and a barrier layer 8 formed above the piezoelectric film 6. The buffer layer 5 and the barrier layer 8 are composed of perovskite type Pb((Zr<SB>1-x</SB>Ti<SB>x</SB>)<SB>1-y</SB>Nb<SB>y</SB>)O<SB>3</SB>, where 0≤x≤1, 0.05≤y≤0.3, and the piezoelectric film 6 is composed of perovskite type relaxer material. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
| 申请公布号 |
JP2005328007(A) |
申请公布日期 |
2005.11.24 |
| 申请号 |
JP20040146944 |
申请日期 |
2004.05.17 |
| 申请人 |
SEIKO EPSON CORP |
发明人 |
MIYAZAWA HIROSHI;NOGUCHI MOTOHISA;KIJIMA TAKESHI |
| 分类号 |
B41J2/045;B41J2/055;B41J2/135;B41J2/14;B41J2/145;B41J2/16;C04B35/49;C04B35/491;H01L41/08;H01L41/09;H01L41/18;H01L41/187;H01L41/22;H01L41/311;H01L41/319;H02N2/00;H03B5/30;H03H9/17;H03H9/25;H03H9/64 |
主分类号 |
B41J2/045 |
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