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发明名称
METHOD OF PURIFYING CHLORINE OR HYDROGEN CHLORIDE FOR SEMICONDUCTORS
摘要
申请公布号
JPS5265194(A)
申请公布日期
1977.05.30
申请号
JP19750141001
申请日期
1975.11.25
申请人
TAKAISHI TETSUO
发明人
TAKAISHI TETSUO
分类号
C01B7/07
主分类号
C01B7/07
代理机构
代理人
主权项
地址
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