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发明名称
摘要
申请公布号
JPS5234327(B2)
申请公布日期
1977.09.02
申请号
JP19730115273
申请日期
1973.10.13
申请人
发明人
分类号
H01J9/233;H01J29/02;H01J29/45;H01L21/00;H01L27/00;H01L31/10
主分类号
H01J9/233
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