发明名称 |
SEMICONDUCTOR DEVICE |
摘要 |
PURPOSE:To easily perform the positioning of each device in stack structure, by forming a projection type or a recess type pattern which serves as the mark to position each circuit element constituted by stack on a substrate or an insulator layer. CONSTITUTION:The projection type or recess type patterns 2 and 2' which serve the mark to position each circuit element constituted by stack are formed on the substrate 0 or the insulator layer 3. Then, it becomes possible to easily form the second layer device 4 and a layer wiring 5 with the pattern 2' as the standard. |
申请公布号 |
JPS58140144(A) |
申请公布日期 |
1983.08.19 |
申请号 |
JP19820023818 |
申请日期 |
1982.02.16 |
申请人 |
MATSUSHITA DENKI SANGYO KK |
发明人 |
YOSHINO MASARU;NAKAYAMA MITSUO;YONEDA MASATO |
分类号 |
H01L27/00;H01L21/3213;H01L27/06 |
主分类号 |
H01L27/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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