发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To easily perform the positioning of each device in stack structure, by forming a projection type or a recess type pattern which serves as the mark to position each circuit element constituted by stack on a substrate or an insulator layer. CONSTITUTION:The projection type or recess type patterns 2 and 2' which serve the mark to position each circuit element constituted by stack are formed on the substrate 0 or the insulator layer 3. Then, it becomes possible to easily form the second layer device 4 and a layer wiring 5 with the pattern 2' as the standard.
申请公布号 JPS58140144(A) 申请公布日期 1983.08.19
申请号 JP19820023818 申请日期 1982.02.16
申请人 MATSUSHITA DENKI SANGYO KK 发明人 YOSHINO MASARU;NAKAYAMA MITSUO;YONEDA MASATO
分类号 H01L27/00;H01L21/3213;H01L27/06 主分类号 H01L27/00
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