METHOD AND APPARATUS FOR THE MICRO-ANALYSIS OR IMAGING OF SAMPLES

摘要

Apparatus for the micro-analysis or imaging of a sample comprises: (a) an arrangement for producing a scanning micro-focussed neutral atom beam said arrangement itself comprising; (i) means (1) for generating an ion beam, (ii) means (4) for for scanning the ion beam, (iii) means (5) for focussing the ion beam towards the position at which the sample (8) will be located; and (iv) charge exchange means (6) between the focussing means and the sample position whereby a scanning neutral beam focussing on the sample is produced; and (b) detection means (9) for detecting particles emitted from the sample.