PROCESS FOR THE PROTECTION OF A DIAPHRAGM DURING THE GENERATION OF ELECTRON BEAM PULSES

摘要

The invention relates to a process for the protection of a diaphragm during the generation of electron-beam pulses by means of alternately deflecting the electron beam onto the diaphragm and onto a processing site. In order to prevent damage to the diaphragm from the thermal effect of the electron beam, the electron beam is distributed with respect to space and/or time over an enlarged striking surface.