| 摘要 |
PURPOSE:To provide a tunnel microscope which can prevent a probe from jogging displacement to another direction than a direction when displaced. CONSTITUTION:Piezoelectric elements 2X, 2Y, 2Z are supported to the supporting parts 1a, 1b, 1c of a base member 1. An insulating member 3 is fixed directly to the piezoelectric element 2Z and to the piezoelectric elements 2X, 2Y via parallel plane structures 10X, 10Y. An attachment part 4 to which a probe 5 is attached is fixed thereto. When the piezoelectric element 2Z is driven, the probe 5 is displaced to a Z-axial direction, but in doing so the parallel plane structures 10X, 10Y are deformed to move the insulating member 3 in parallel, so that the piezoelectric elements 2X, 2Y are free from deformation by the driving force of the piezoelectric element 2Z. As a result, the displacement of the probe 5 to another direction than a Z-axial direction is prevented. |
