| 摘要 |
PURPOSE:To form a pattern having a high aspect ratio and a satisfactory shape even when the film thickness is increased by incorporating an alkali-soluble resin, a crosslinking agent capable of crosslinking the alkali-soluble resin by the action of an acid and a specified compd. CONSTITUTION:An alkali-soluble resin, a crosslinking agent capable of crosslinking the alkali-soluble resin by the action of an acid and a compd. represented by the formula and generating the acid under light are incorporated. In the formula, each of R<1> and R<2> is H or alkyl, each of R<3>-R<7> is H, alkyl or alkoxy but R<4> and R<6> are not simultaneously alkoxy, and each of R<8> and R<9> is H or haloalkyl but R<8> and R<9> are not simultaneously H. The alkali-soluble resin is not especially limited if the unexposed part of the resin is alkali-soluble at the time of development and is leached in an alkali developer but novolak resin or polyvinyl phenol is preferably used. |
