METHOD FOR ETCHING PT-BASED ALLOY,申请号JP19930274220-传众专利搜索

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发明名称	METHOD FOR ETCHING PT-BASED ALLOY
摘要
申请公布号	JPH07130712(A)	申请公布日期	1995.05.19
申请号	JP19930274220	申请日期	1993.11.02
申请人	NEC CORP	发明人	KINOSHITA KEIZO
分类号	H01L21/28;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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