Method for manufacturing an array of thin film actuated mirrors

摘要

An improved method for manufacturing an array of MxN thin film actuated mirrors comprises the steps of: providing an active matrix including MxN connecting terminals; constructing a thin film sacrificial layer on the top surface of the active matrix; removing portions of the thin film sacrificial layer surrounding each of the connecting terminals; forming a supporting member in each of the removed portions to thereby form a supporting layer; forming an elastic layer on top of the supporting layer; structuring a conduit in each of the supporting members and the elastic layer; depositing a second thin film layer on top of the elastic layer; patterning the second thin film layer into MxN second thin film electrodes; forming a thin film electrodisplacive layer on top of the second thin film electrodes and the elastic layer; patterning the thin film electrodisplacive layer into MxN thin film electrodisplacive members; patterning the elastic layer into MxN elastic members; depositing a first thin film layer thereon; patterning the first thin film layer into MxN first thin film electrodes; and removing the thin film sacrificial layer to thereby form the array of MxN thin film actuated mirrors.