发明名称 CASSETTE DETECTING MECHANISM
摘要 PROBLEM TO BE SOLVED: To avoid the generation of disconnection of a sensor cable and moreover, to provide a cassette detecting mechanism which can realize a compact robot arm. SOLUTION: In a cassette detecting mechanism, which is provided with a base 1, arms 2 and 4 supported on this base 1 and a support stand 9 for mounting a cassette 8 on the tip of this arm 4, the support stand 9 is provided with a plug 11 which descends by the weight of the cassette 8, while a support pillar 1a is provided with a photosensor 20 for detecting the descending plug 11 and a detection of the presence or absence of the cassette 8, which is mounted on a robot arm for cassette transfer, is conducted in an external manner without passing a sensor cable through the robot arm.
申请公布号 JPH10144756(A) 申请公布日期 1998.05.29
申请号 JP19960296412 申请日期 1996.11.08
申请人 KOKUSAI ELECTRIC CO LTD 发明人 HAYASHI AKINARI
分类号 B65G49/07;H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 B65G49/07
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