| 发明名称 |
Method for achieving a wear performance which is as linear as possible and tool having a wear performance which is as linear as possible |
| 摘要 |
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| 申请公布号 |
SG76568(A1) |
申请公布日期 |
2000.11.21 |
| 申请号 |
SG19980004289 |
申请日期 |
1998.10.27 |
| 申请人 |
WACKER SILTRONIC GESELLSCHAFT FUR HALBLEITERMATERIALIEN AG |
发明人 |
RIPPER BERT;HOFMANN ROBERT;LEHFELD PETER;LUNDT HOLGER |
| 分类号 |
B24B49/00;B24D13/14;H01L21/304;H01L21/306;(IPC1-7):H01L21/304;B24B7/00;G01B21/20 |
主分类号 |
B24B49/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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