发明名称 METHOD OF MANUFACTURING SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a substrate which is capable of surely forming resin layers of prescribed shapes on the substrate having the resin layers formed of the photosensitive uncured resin layers of which exposed portions are insoluble in a developer. SOLUTION: The method of manufacturing the substrate 1 has an exposure step of exposing the substrate 31 having the photosensitive uncured resin layers 33 which are half-cured near the surface by exposure and made insoluble in the developer, a developing step of developing the substrate 31, a heating process step of heating the substrate 31 and a projecting part removing step for breaking off the projecting parts 37 by jetting liquid to the substrate 31. In the exposure step, the uncured resin layers 33 are exposed in such a manner that the thickness at the base ends of the projecting parts 37 to be formed afterward attains 4 to 8μm.
申请公布号 JP2002202613(A) 申请公布日期 2002.07.19
申请号 JP20000401795 申请日期 2000.12.28
申请人 NGK SPARK PLUG CO LTD 发明人 TOYOSHIMA TAKESHI;MATSUURA YASUNARI;TOYODA YASUTSUGU;OGAWA MASAHIRO
分类号 G03F7/26;G03F7/20;G03F7/40;H05K3/00;(IPC1-7):G03F7/26 主分类号 G03F7/26
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