| 摘要 |
PROBLEM TO BE SOLVED: To provide an aligner wherein identification of a part in which dangerous situation is generated and a part in which trouble is generated can be performed quickly when an interlock mechanism is operated, in an aligner provided with a chamber having a plurality of doors. SOLUTION: This aligner EX is provided with the chamber C which accommodates an aligner main body E and has the plural doors D1-D9, detecting devices S1-S9 which are disposed on the respective doors D1-D9 and detect opening and closing situation of the doors D1-D9, and a display device DP for displaying the respective opening and closing situations of the plural doors D1-D9 on the basis of the respective detected results of the detecting devices S1-S9.
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