发明名称 Tension mask assembly for use in vacuum deposition of thin film of organic electroluminescent device
摘要 A mask frame assembly used in vacuum deposition of thin films of an organic electroluminescent device. The mask frame assembly includes a frame having an opening and at least two unit masks which each have at least one unit masking pattern portion in the direction of the unit mask and two edges which are fixed to the frame under tension.
申请公布号 US6858086(B2) 申请公布日期 2005.02.22
申请号 US20020223471 申请日期 2002.08.20
申请人 SAMSUNG OLED CO., LTD. 发明人 KANG CHANG HO
分类号 H05B33/10;C23C14/04;C23C14/12;C23C14/24;H01L51/40;H01L51/50;H01L51/56;(IPC1-7):C23C16/00;C23C14/00;C23C16/04 主分类号 H05B33/10
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