METHOD FOR FORMING THIN FILM, AND SUBSTRATE USING IT FOR ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To further improve a peel strength of a plated underlayer even to a substrate made of a liquid crystal polymer added with no filler. SOLUTION: This thin-film-forming method includes etching a substrate material in an etching step 32 by immersing it in a compound solution having an amino group or a thiol group as a functional group in endpoints of the molecule, such as a prescribed ethylenediamine solution, for a predetermined period; ultrasonically cleaning the etched substrate material in a polar organic solvent such as a N-methylpyrrolidinone (NMP) solution for ten minutes, in a cleaning step 34; and ultrasonically cleaning the ultrasonically cleaned substrate material in ultrapure water for ten minutes. COPYRIGHT: (C)2005,JPO&NCIPI