Misalignment sensor for measuring misalignment in an object to be measured has a projector, a photo-receiver with a screen and a lens unit with a lens moving to and fro along an optical axis

摘要

A sensor head (SH) (1) has a projector (3) with a laser diode (30). A photo-receiver (4) contains a photodiode (40) and an apertured diaphragm (41). A coaxial confocal optical system contains half-mirrors (5a,5b) and three lenses (6,7a,7b). In the SH there is a hole (10) for a light for an optical system. On the hole there is a cylindrical body (11) that has a continuous internal thread.