APPARATUS FOR SUPPORTING SUBSTRATE, AND EXPOSURE APPARATUS HAVING THE SAME,申请号KR20010012639-传众专利搜索

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发明名称	APPARATUS FOR SUPPORTING SUBSTRATE, AND EXPOSURE APPARATUS HAVING THE SAME
摘要
申请公布号	KR100752091(B1)	申请公布日期	2007.08.28
申请号	KR20010012639	申请日期	2001.03.12
申请人		发明人
分类号	H01L21/027;H01L21/683;G03F7/20	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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