| 摘要 |
An apparatus for transporting a substrate is provided to carry in and out the substrate simultaneously by driving independently substrate transporters using a rotatable robot arm and a direct driving device. A substrate processing apparatus(10) comprises a substrate loader(100), a substrate transporting apparatus(200) and a processing module(300). The substrate loader provides the substrate(w) and retrieves it. A robot arm(110) is installed rotatably, and provides the substrate to an adjacent processing module(300). The substrate transporting apparatus transports the substrate in between the substrate loader and the process module, and comprises at least one of substrate transporting parts in which a direct driving device(220,230) and robot arms(221,231) are installed. The processing module receives the substrate from the substrate transporter and processes it, and then returns the substrate to the substrate transporting apparatus again.
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