| 摘要 |
A probe unit is provided to prevent damage to a specimen's surface by setting horizontality of the probe unit, keeping contact with the surface of the specimen by all probes. A probe unit includes a work table and a manipulator. The work table includes a bracket(200) having a vacuum suction unit and an air exhaust unit. The air exhaust unit makes separation of the specimen after inspection easy. The manipulator is fixed to the work table to inspect the flat degree of the specimen, and includes a support arm connected to the work table and a support block supporting the bracket against the support arm having a cut part on a side thereof.
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